- Contact Person : Ms. Chan Lorna
- Company Name : Zhaoqing Zhenhua Vacuum Machine Co., Ltd.
- Tel : 0086-758-2787178
- Fax : 0086-758-2787698
- Address : Guangdong,Zhaoqing,No.2 Xinghua Road, Duanzhou Technology Zoom, No.1 Duanzhou Road
- Country/Region : China
- Zip : 526060
Mid-frequency magnetron sputtering Vacuum Coating machine
Detailed Product Description
Magnetron sputtering, Mid-frequency and Multi-arc Ion Coating Equipment
combine three kinds of technologies: DC magnetron sputtering, mid-frequency sputtering and multi-arc ion. It is widely used for coating TiN, TiC, TiCN, TiAIN, CrN, Cu, Au, DLC and decorative film on the surface of substrates. Magnetron sputtering technique helps to increase attaching force, density of film layer. PLC and HMI make up the fully automatic electric controlling system.
Technical parameter specification
Model | ZCK-1000 | ZCK-1150 | ZCK-1200 | ZCK-1400 | ZCK-1600 |
Chamber Size | 1000×1200 | 1150×1200 | 1200×1400 | 1400×1600 | 1600×1950 |
Coating Film Type | TiN, TiC, TiAIN, antifriction and super hard film, DLC, decorative film | ||||
Supply Type | DC supply, mid-frequency supply, voltaic arc supply, heater supply, active supply and pulse bias supply | ||||
Multi-arc Target | multi-arc target 5 pieces or 18 pieces | ||||
Twins Target | mid-frequency twins target or planar target (1-4pairs) | ||||
Vacuum Chamber | vertical (double deck water jacket or water chase), pumping system postpositioned | ||||
Vacuum System | rotary pump & roots pump & diffusion pump & maintaining pump (optional: molecular, deep cold pump or deep cold system) | ||||
Heating System | from normal temperature to 350 degrees PID controlled, heated by stainless steel tube | ||||
Inflation System | mass flow controller (1-4 ways) | ||||
Ultimate Vacuum | 6×10-4Pa clean and unloaded | ||||
Pump Time | from atmosphere to 5×10-3Pa less than 13 minutes | ||||
Keep Pressure Ratio | 1h≤0.6Pa | ||||
Rotation | top rotation or bottom rotation & rotation and revolution, stepless speed regulation of frequency conversion, 0-20r/min | ||||
Controlling Method | manual & semi automatic / touching screen & PLC | ||||
Remark | Can be designed and made according to customers request | ||||
The above is for your information only
