Zhaoqing Zhenhua Vacuum Machine Co., Ltd.
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  • Contact Person : Ms. Chan Lorna
  • Company Name : Zhaoqing Zhenhua Vacuum Machine Co., Ltd.
  • Tel : 0086-758-2787178
  • Fax : 0086-758-2787698
  • Address : Guangdong,Zhaoqing,No.2 Xinghua Road, Duanzhou Technology Zoom, No.1 Duanzhou Road
  • Country/Region : China
  • Zip : 526060

Mid-frequency magnetron sputtering Vacuum Coating machine

Mid-frequency magnetron sputtering Vacuum Coating machine
Product Detailed
Related Categories:Diodes

Detailed Product Description


Magnetron sputtering, Mid-frequency and Multi-arc Ion Coating Equipment  

combine three kinds of technologies: DC magnetron sputtering, mid-frequency sputtering and multi-arc ion. It is widely used for coating TiN, TiC, TiCN, TiAIN, CrN, Cu, Au, DLC and decorative film on the surface of substrates. Magnetron sputtering technique helps to increase attaching force, density of film layer. PLC and HMI make up the fully automatic electric controlling system.

Technical parameter specification

Model

ZCK-1000

ZCK-1150

ZCK-1200

ZCK-1400

ZCK-1600

Chamber Size

1000×1200

1150×1200

1200×1400

1400×1600

1600×1950

Coating Film Type

TiN, TiC, TiAIN, antifriction and super hard film, DLC, decorative film

Supply Type

DC supply, mid-frequency supply, voltaic arc supply, heater supply, active supply and pulse bias supply

Multi-arc Target

multi-arc target 5 pieces or 18 pieces

Twins Target

mid-frequency twins target or planar target (1-4pairs)

Vacuum Chamber

vertical (double deck water jacket or water chase), pumping system postpositioned

Vacuum System

rotary pump & roots pump & diffusion pump & maintaining pump (optional: molecular, deep cold pump or deep cold system)

Heating System

from normal temperature to 350 degrees PID controlled, heated by stainless steel tube

Inflation System

mass flow controller (1-4 ways)

Ultimate Vacuum

6×10-4Pa clean and unloaded

Pump Time

from atmosphere to 5×10-3Pa less than 13 minutes

Keep Pressure Ratio

1h≤0.6Pa

Rotation

top rotation or bottom rotation & rotation and revolution, stepless speed regulation of frequency conversion, 0-20r/min

Controlling Method

manual & semi automatic /  touching screen & PLC

Remark

Can be designed and made according to customers request

The above is for your information only



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