Zhaoqing Zhenhua Vacuum Machine Co., Ltd.
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  • Contact Person : Ms. Chan Lorna
  • Company Name : Zhaoqing Zhenhua Vacuum Machine Co., Ltd.
  • Tel : 0086-758-2787178
  • Fax : 0086-758-2787698
  • Address : Guangdong,Zhaoqing,No.2 Xinghua Road, Duanzhou Technology Zoom, No.1 Duanzhou Road
  • Country/Region : China
  • Zip : 526060

ZCK-1150 Mid-frequency Magnetron Sputtering coater

ZCK-1150 Mid-frequency Magnetron Sputtering coater
Product Detailed
Related Categories:Metal Coating Machinery

Detailed Product Description


ZCK-1150 Mid-frequency Magnetron Sputtering coater is a kind of low energy consumption and environment friendly machine. Voltaic source ion pulse and mid-frequency magnetron sputtering technology combined together make the equipment widely used. It can avoid strike fire, anode disappear and target poisoning with mid-frequency power source and twins target, increase ionized factor, sputtering speed and deposition speed. It is suitable for coating compound such as SiO2, ZrO2, TiO2, TiN, TiC, TiCN, TiAlN and hard Chrome.

It is used in the decoration field of horologe, glasses, hardware, ceramics, dishware and so on.

Model

ZCK-1150 mid-frequency magnetron sputtering coater

Chamber size

Φ1150x1200

Fixture size

9shafts,Φ220x900 top rotation

Pumping time

From atmosphere 8x10-3Pa<12mimunloaded

Ultimate vacuum

≤4x10-4Pa

Voltaic arc source

8 pieces 2KW

Mid-frequency target

1 pair 30KW

Monopole pulse negative bias

20KW 100-1000V 20A    50V-500V 40A

Baking temperature

350 thermostatic control

Vacuum system

KT-400(2 sets)/F400/3500 Molecular pump(2 sets),ZJP-300, 2X-70

Inflation system

Three ways mass flow controller (500ccm two ways and 1000ccm one way)

Filament ionized system

Filament heating: 10kw  heater bias: 3kw

Heating system

18KW

Total / average power

50KW/30KW

Used for

Hardware, electronics and plastic products.

Remark

Can be designed according to customers request



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