ZCK-1150 Magnetron Sputtering Vacuum Coating Machine

Detailed Product Description

Magnetron Sputtering Vacuum Coating Machine is multi-functional vacuum machine which is suitable for coating different material. It is a kind of low energy consumption and environment friendly machine which has more advantages compare with those like products. Voltaic source ion pulse and mid-frequency magnetron sputtering technology combined together make the equipment widely used. It can avoid strike fire, anode disappear target poisoning with mid-frequency power source and twins target, increase ionized factor, sputtering speed ratio and deposition speed. It is suitable for coating compound such as SiO2, ZrO2, TiO2, TiN, TiC, TiCN, TiAlN.

It is widely used in horologe, glasses frame, mobile shell, hardware, sanitary ware, dishware, cutter & mould which require antifriction and extra hard films. It can be used for coating TiN, TiCN, CrN, TiALN, TiNbu, TiCrN, ZrN, TiNC and DLC film.

 

Model	ZCK-1150  magnetron sputtering coater
Chamber size	Φ1150x1200
Fixture size	9shafts,Φ220x900 top rotation
Pumping time	From atmosphere 8x10-3Pa<12min unloaded
Ultimate vacuum	≤4x10-4Pa
Voltaic arc source	8pieces 2KW
Mid-frequency target	1pair 30KW
Monopole pulse negative bias	20KW100-1000V 20A    50V-500V 40A
Baking temperature	350 thermostatic control
Vacuum system	KT-400(2 sets)/F400/3500 Molecular pump(2 sets),ZJP-300, 2X-70
Inflation system	Three ways mass flow controller (500ccm two ways and 1000ccm one way)
Filament ionized system	Filament heating: 10kw     heater bias: 3kw
Heating system	18KW
Total / average power	50KW/30KW
Used for	Hardware, mobile and electronics
Remark	Can be designed according to customers request